Geometric

Inventory Classification
  • Materials Characterization
  • Physical Properties
  • Geometric

Toho FLX-2320-S Thin Film Stress Measurement Systems offer industry standard capabilities for mass production and research facilities that demand accurate stress measurements on various films and substrates up to 200mm in diameter. Incorporating KLA-Tencor’s patented “Dual Wavelength” technology, Toho FLX Series tools determine and analyze surface stress caused by deposited thin films. The Toho FLX systems offer outstanding value in a variety of comprehensive Stress Measurement Solutions that utilize advanced measurement principles.

University Tag Number: 
182235
Availability: 
Contact Custodian for availability
  • Greg Strommen
Location
Research II
Room Number: 
122B