TA Instruments’ TMA Model 2940 is an industry standard research grade thermomechanical analyzer with flexibility in operating modes, test probes, fixtures, and available signals. The open architecture allows for easy sample loading and probe placement. Flexibility of sample thermocouple allows for precise positioning in order to optimize temperature measurement.
Toho FLX-2320-S Thin Film Stress Measurement Systems offer industry standard capabilities for mass production and research facilities that demand accurate stress measurements on various films and substrates up to 200mm in diameter. Incorporating KLA-Tencor’s patented “Dual Wavelength” technology, Toho FLX Series tools determine and analyze surface stress caused by deposited thin films. The Toho FLX systems offer outstanding value in a variety of comprehensive Stress Measurement Solutions that utilize advanced measurement principles.
CMS-18 thin film deposition system offers wide possibilities for preparation of known and new materials and structures in the form of thin films.
Four magnetron sources allow preparation of various materials (metal, semiconductor, dielectric, metastable etc.) in a wide range of compositions and structures using deposition, code position, sequential deposition and reactive deposition processes.
ICP Inductively Coupled Plasma Etch System. For applications requiring a downstream, high density plasma source. Allows for higher plasma densities at lower pressures. Tight anisotropy in high aspect ratio structures and reduces microloading effect. Four MFC gas inputs mounted in separate cabinet. System has turbo pump and roughing pump. Two RFX-600 13.56 MHz RF generators. 200mm substrate chuck.
Annealing and densification furnace. Capable of wafer sizes up to 150mm. Temperature range of 200 - 850 °C. Gases used: N2H2, N2, Ar, O2. System can also be setup for 1200 °C with 100 mm wafers.
Temperature Shock Chamber (vendor: ESPEC, model TSD-100)
This large two-zone chamber provides rapid temperature cycling up to six times per hour. This induces metal fatigue, polymer cracking, interfacial delamination, and other failure mechanisms of interest to the electronics industry.
Coatings requiring Ultra-Violet radiation to initiate curing can be run through our LC6B Benchtop ConveyorTM from Fusion UV. This unit features high power industrial UV irradiators with bulbs that are easily changed to obtain the desired spectral output. Samples are fed through on a conveyor belt where UV dosage is controlled by the conveyor belt speed.
Vertex 70 Fourier Transform Infrared Spectrometer Bruker Optics’ Vertex 70 is a fully digital FTIR spectrometer with easy to use OPUSTM and OPUSLabTM software ready to meet project needs for demanding R&D applications. It has a large sample compartment that can accommodate almost any FTIR sampling accessory. In addition, it is equipped with a high throughput screening extension (HTS-XT) that permits continuous 24 hour operation, capable of analyzing more than 5,000 samples a day without operator intervention.
