RCA Research Operations

Department Number: 
4310

Department Inventory

Thin film measurement system that measures the thickness of thin films like oxides, nitrides, and photo resist. Uses spectroscopic reflectometry to determine film thickness and other film details.

University Tag Number: 
170493
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
122B
  • Film thickness from 100A to 50 microns
  • Spot size 6.5um to 65um
  • Wavelength range 400-800nm
  • 3"-8" wafers
  • 16 standard films tests
  • Special films can be measured by entering the refractive index
University Tag Number: 
170493
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
122B

Nicolet NXR 9650 FT-Raman Spectrometer Thermo Scientifics’ Nicolet NXR 9650 FT-Raman spectrometer is capable of producing high-quality Raman measurements using high-speed scanning, sample mapping, screening applications, and kinetic analysis. The Nicolet NXR 9650 FT-Raman can measure organic and inorganic samples using a spectral range down to 100cm-1 which is advantageous for inorganic samples where bands are typically observed at low frequencies. Measurements of samples can be taken directly through clear glass bottles, jars, vials and tubes.

University Tag Number: 
180756
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
116

Veeco’s NT3300 Non-Contact Optical Profiler features advanced automation and outstanding software for highly accurate, 3D surface topography measurements. The most advanced surface metrology system available, the NT3300 rapidly measures heights from Angstroms to millimeters, with vertical resolution down to 0.1 nm. The NT3300 is ideally suited for quality inspection, failure analysis, and rapid production measurement of MEMS, semiconductor packaging, medical devices, automotive systems and many other applications.

University Tag Number: 
167666
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
116

The Agilent GCMS characterizes products of polymerization reactions. For instance, unreacted monomer content can be measured to determine polymerization kinetics. The mass spectrometer is equipped with Electron ionization (EI) and has a mass range of 1.6 to 800 amu. This system is also equipped with a 100 sample autosampler for automated sample introduction and an automated data system for instrument control, data acquisition and analysis. It also contains an electronic library for unknown compound searching and identification.

University Tag Number: 
180757
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Aaron Reinholz
Location Description
Research 1 Addition
Room Number: 
1130
Inventory Classification

PLC controller with touch screen provides an intuitive graphical interface and real time process representation
Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
Proprietary software control system generates process and production data for statistical process control

University Tag Number: 
171765
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Frederik Haring
Location Description
Research II
Room Number: 
126B

Oxford Plasmalab 100 PECVD
Liquid and solid precursor to system modified Nitride and Si02 films. Boron and silicon carbide deposition. Anamorphous silicon deposition single wafer load lock capable of 100 mm to 200 mm. System modified for Liquid and Solid Precursor deposition.

University Tag Number: 
173012
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
122C

A plasma jet is a plasma source where a pair of metal electrodes with a sharp point, contained in a cylinder made of dielectric material, and is connected to a high voltage generator. A stream of Helium or Argon is blown in the insulated cylinder so that the electrode finds itself in contact with the gas. Due to the high electric field near the electrode’s sharp point, Helium or Argon ionizes and a mixture of electrons, ions and metastable atoms and molecules is blown by the flow stream towards the exit nozzle.

University Tag Number: 
184823
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • James Bahr
Location Description
Research I Addition
Room Number: 
1238

Plasma Enhanced Chemical Vapor Deposition: PECVD • 13.56 MHz driven parallel plate reactor • kHz and "frequency mixing" optional • shower head gas inlet optimized for PECVD • 400° C and 700° C substrate electrodes

University Tag Number: 
173251
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Greg Strommen
Location Description
Research II
Room Number: 
122C

Agilent N5242A PNA-X Vector Network Analyzer, Frequency Range: 10MHz – 26.5GHz The PNA-X network analyzer is the world´s most integrated and flexible single-connection microwave test engine for measuring active devices such as amplifiers, mixers, and frequency converters. You can choose from five frequency models to meet your specific device test needs. The PNA-X provides unrivaled configurability with a built-in second source, combiner, and internal signal-routing switches.

University Tag Number: 
180770
Availability: 
Contact Custodian for availability
  • RCA Research Operations
  • Bob Gilbertson
Location Description
Research II
Room Number: 
112