The JEOL JEM-100CX II is a tungsten-filament 100kV transmission electron microscope. Digital imaging with Gatan Erlangshen ES500W camera, Gatan Digital Micrograph software.
High-resolution 200-kV LaB6 analytical transmission electron microscope system (NSF MRI #0821655). Energy dispersive X-ray spectrometry (EDS), scanning transmission electron microscopy (STEM), and parallel electron energy-loss spectrometry (EELS) for microanalysis. Magnifications of 2,000 to 1,500,000 times; optimal resolution 0.23 nm. Gatan dimple grinder and Gatan Precision Ion Polishing System (PIPS) for sample preparation.
ICP Inductively Coupled Plasma Etch System. For applications requiring a downstream, high density plasma source. Allows for higher plasma densities at lower pressures. Tight anisotropy in high aspect ratio structures and reduces microloading effect. Four MFC gas inputs mounted in separate cabinet. System has turbo pump and roughing pump. Two RFX-600 13.56 MHz RF generators. 200mm substrate chuck.
Annealing and densification furnace. Capable of wafer sizes up to 150mm. Temperature range of 200 - 850 °C. Gases used: N2H2, N2, Ar, O2. System can also be setup for 1200 °C with 100 mm wafers.
Temperature Shock Chamber (vendor: ESPEC, model TSD-100)
This large two-zone chamber provides rapid temperature cycling up to six times per hour. This induces metal fatigue, polymer cracking, interfacial delamination, and other failure mechanisms of interest to the electronics industry.
Designed for routine and research histopathology of up to 300 cassettes.
Proven technology combined with top quality components and Leica RemoteCare diagnostic provide superior instrument reliability.
Straightforward routine user operations by an intuitive user interface, color touch screen and a variety of “smart” features, such as Reagent Management System and quick start for commonly used programs, improve specimen quality and laboratory economy.
Coatings requiring Ultra-Violet radiation to initiate curing can be run through our LC6B Benchtop ConveyorTM from Fusion UV. This unit features high power industrial UV irradiators with bulbs that are easily changed to obtain the desired spectral output. Samples are fed through on a conveyor belt where UV dosage is controlled by the conveyor belt speed.
