Nanometrics Model 2100 Film Thickness Measurements
Inventory Classification
- Film thickness from 100A to 50 microns
- Spot size 6.5um to 65um
- Wavelength range 400-800nm
- 3"-8" wafers
- 16 standard films tests
- Special films can be measured by entering the refractive index
University Tag Number:
170493
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
122B
Acquisition Date:
June 1, 2004