Nanometrics Model 2100 Film Thickness Measurements

  • Film thickness from 100A to 50 microns
  • Spot size 6.5um to 65um
  • Wavelength range 400-800nm
  • 3"-8" wafers
  • 16 standard films tests
  • Special films can be measured by entering the refractive index
University Tag Number: 
170493
Availability: 
Contact Custodian for availability
Location
Research II
Room Number: 
122B
Acquisition Date: 
June 1, 2004