Nanometrics Model 2100 Film Measurements
Inventory Classification
Thin film measurement system that measures the thickness of thin films like oxides, nitrides, and photo resist. Uses spectroscopic reflectometry to determine film thickness and other film details.
University Tag Number:
170493
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
122B
Acquisition Date:
June 1, 2004