PLASMA ETCHER, AP-1000 HPT
Inventory Classification
PLC controller with touch screen provides an intuitive graphical interface and real time process representation
Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
Proprietary software control system generates process and production data for statistical process control
University Tag Number:
171765
Serial Number:
P100163
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
126B
Acquisition Date:
October 1, 2004