Single Wafer Spin Processor

The WS-400 is a single wafer, manual dispense spin processor with a nitrogen purged process chamber and is manipulated by a digital controller.  The wafer is held in place during process by means of a vacuum chuck.  The digital controller has twenty programs each with fifty-one steps stored in non-volatile memory.  The program sizes and steps can be changed.

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Contact Custodian for availability
Research 1
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Acquisition Date: 
August 26, 2005