Single Wafer Spin Processor
Inventory Classification
The WS-400 is a single wafer, manual dispense spin processor with a nitrogen purged process chamber and is manipulated by a digital controller. The wafer is held in place during process by means of a vacuum chuck. The digital controller has twenty programs each with fifty-one steps stored in non-volatile memory. The program sizes and steps can be changed.
University Tag Number:
173091
Availability:
Contact Custodian for availability
Location
Research 1
Room Number:
168
Acquisition Date:
August 26, 2005