Single Wafer Spin Processor

The WS-400 is a single wafer, manual dispense spin processor with a nitrogen purged process chamber and is manipulated by a digital controller.  The wafer is held in place during process by means of a vacuum chuck.  The digital controller has twenty programs each with fifty-one steps stored in non-volatile memory.  The program sizes and steps can be changed.

University Tag Number: 
173091
Availability: 
Contact Custodian for availability
Location
Research 1
Room Number: 
168
Acquisition Date: 
August 26, 2005