Tube Furnace/Carbolite

Annealing and densification furnace. Capable of wafer sizes up to 150mm. Temperature range of 200 - 850 °C. Gases used: N2H2, N2, Ar, O2. System can also be setup for 1200 °C with 100 mm wafers.

University Tag Number: 
173268
Availability: 
Contact Custodian for availability
Location
Research II
Room Number: 
122C
Acquisition Date: 
August 30, 2007