SCANNING ELECTRON MICROSCOPE

JEOL's JSM-6010LA InTouchScopeTM Scanning Electron Microscope (SEM) is an analytical, low vacuum SEM featuring integrated Energy Dispersive Spectroscopy (EDS) with the latest Silicon Drift Detector (SDD) technology. The JSM-6010LA has the capability of qualitative and quantitative elemental analysis using simultaneous multiple live image and movie capture. The system also comes equipped with an infrared chamberscope and a 6 inch wafer stage. Features § Resolution (HV) § 4nm at 20kV § 8nm at 3kV § 15nm at 1kV § Resolution (LV) § 5nm at 20kV § Magnification § 5x to 300,000x § Acceleration Voltage § 0.5kV-20kV § LV Detector § BSED § Maximum Specimen Size § Observation: 125mm § Maximum: 152mm § Height: 49mm

University Tag Number: 
182233
Serial Number: 
MP11000007
Availability: 
Contact Custodian for availability
Location
Research II
Room Number: 
116
Acquisition Date: 
February 17, 2011