SCANNING ELECTRON MICROSCOPE
Inventory Classification
JEOL's JSM-6010LA InTouchScopeTM Scanning Electron Microscope (SEM) is an analytical, low vacuum SEM featuring integrated Energy Dispersive Spectroscopy (EDS) with the latest Silicon Drift Detector (SDD) technology. The JSM-6010LA has the capability of qualitative and quantitative elemental analysis using simultaneous multiple live image and movie capture. The system also comes equipped with an infrared chamberscope and a 6 inch wafer stage. Features § Resolution (HV) § 4nm at 20kV § 8nm at 3kV § 15nm at 1kV § Resolution (LV) § 5nm at 20kV § Magnification § 5x to 300,000x § Acceleration Voltage § 0.5kV-20kV § LV Detector § BSED § Maximum Specimen Size § Observation: 125mm § Maximum: 152mm § Height: 49mm
University Tag Number:
182233
Serial Number:
MP11000007
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
116
Acquisition Date:
February 17, 2011