KLA-Tencor P11 Long Scan Profilometer
Contact surface profiler capable of measuring step height, roughness, waviness and other surface characteristics. Has a vertical measurement range from under 100 Å to 300 µm. Has a scan length of 8.1” and a scan speed of 1 to 25 µm/s. Also has a programmable force range of 1 to 50 mg.