SUSS MICROTEC RC8-MS3 SPIN COATER
Inventory Classification
200mm spin coater with GYRSET system for better uniformity and lower resin consumption, stainless base cabinet, multiple dispense capability for up to 2 photoresist, 1 nitrogen, and 1 solvent line. Maximum 5000 rpm/sec acceleration, motorized dispense arm, Cybor 5026 pump (05026-60-57-52C6-OP-C6-OK) with 512 power supply, and controller.
University Tag Number:
170500
Serial Number:
RC2445
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
122B
Acquisition Date:
June 1, 2004