Spray Processor System

Used to etch away unwanted metals from substrates or wafers. Has a 6in x 7in workpiece capacity. The workpiece rotates and moves up and down in the spray process chamber. The station consists of PVC construction, titanium hardware and PVC plumbing.

Used for wet developing. It helps develop the patterns that have been masked onto the substrates.

Used for wet stripping. Polypropylene construction for use as a resist stripping machine.

University Tag Number: 
Contact Custodian for availability
Research II
Room Number: 
Acquisition Date: 
January 5, 2005