P-6 Profiler

The P-6 stylus profiler and surface analysis system offers a combination of advanced features for process development and manufacturing control of scientific research, photovoltaic solar manufacturing, data storage, MEMS, opto-electronics, and other industrial metrology applications. The P-6 stylus profiler and surface analysis system utilizes numerous platform and measurement technologies from KLA-Tencor's most advanced semiconductor profiler systems for surface topography analysis - programmable scan stage, low noise, and high quality, high resolution long scans -- but in a smaller, more economical design for substrates up to 150mm.