KLA-TENCOR P15 LONG SCAN PROFILER

KLA-Tencor’s P-15 Longscan Contact Stylus Profiler is capable of measuring the roughness and waviness of a sample’s surface. The P-15 can also measure positive and negative step height features with a high degree of accuracy and precision. Both 2D and 3D scan profiles can be obtained. The P-15 is equipped with a MicroHead IIxr scanner that has a 1mm vertical range and is capable of scanning at forces between 0.5–50mg. The maximum horizontal scan length is 200mm. The instrument’s motorized stage can accommodate substrates up to 8 inches in diameter and allows samples to be held down by vacuum.
Features
§ 2D and 3D analysis
§ Accommodate substrates up to 8 inches in diameter
§ Dual view optics
§ Maximum horizontal scan length: 200mm
§ Maximum substrate weight: 1lb
§ Scan Force: 0.5–50mg
§ Vertical scan range: 0–1000μm
Measurements
§ Step Height
§ Stress
§ Surface Contour
§ Surface Roughness
§ Surface Waviness