KLA Tencor P-15 Profilometer Max Wafer Size: 8” General Description: The KLA-Tencor P-15 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. Roughness can be measured with up to a 0.5 Å resolution over short distances. Waviness can be measured over the entire surface of a sample. The P-15 system uses stylus-based scanning to achieve high resolution and can correlate local submicron features with global surface measurements. It has a scan area of 200 X 200 mm. Capabilities: • Microscopic and Macroscopic Feature Resolution: Combines macroscopic and microscopic surface analysis, and measures features as small as 0.25 μm. • Correlation Scanning: Provides a data reference for comparing the measurements of multiple microscopic features by re-scanning portions of a macroscopic long scan on the microscopic scale. • Die Grid Navigation: Offers an alternative method to that of positioning the sample by XY coordinates. Instead, it selects die location for measuring lithographic patterns in different dies. • 3D imaging. Acceptable substrate materials are flat metal, glass, paper, plastics, ceramic, and semiconductors.

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Research II
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April 4, 2006