Yield Engineering Model YES-5 HMDS Oven
Inventory Classification
Hexamethyldisilazane (HMDS) is used to improve photoresist adhesion to the silicon wafers. Programmable cycles for HMDS application. Capable throughput of 400+ wafers per hour.
University Tag Number:
170494
Availability:
Contact Custodian for availability
Location
Research II
Room Number:
122B
Acquisition Date:
June 1, 2004