Yield Engineering Model YES-5 HMDS Oven

Hexamethyldisilazane (HMDS) is used to improve photoresist adhesion to the silicon wafers. Programmable cycles for HMDS application. Capable throughput of 400+ wafers per hour.

University Tag Number: 
170494
Availability: 
Contact Custodian for availability
Location
Research II
Room Number: 
122B
Acquisition Date: 
June 1, 2004